Characterization, Control, and Use of Dielectric Charge Effects in Silicon Technology
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Published:1969-01
Issue:1
Volume:6
Page:1-12
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Szedon J. R.,Handy R. M.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
23 articles.
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