Author:
Gardner Donald S.,Onuki Jin,Kudoo Kazue,Misawa Yutaka,Vu Quat T.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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5. Layered and homogeneous films of Al and AlSi with Ti and W for multilevel interconnects;Gardner;Trans. Electron Devices,1985
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