The preparation of thin films by physical vapour deposition methods
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference54 articles.
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3. Ion implantation into metals and cabrides
4. Ion implantation in tribology and corrosion science
5. Laser sputtering
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