Effects of oxidation conditions on the properties of tantalum oxide films on silicon substrates
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Conduction processes in the Ta(-)/Ta2O5-electrolyte system
2. Electrical properties of amorphous tantalum pentoxide thin films on silicon
3. Conduction mechanisms in sputtered Ta2O5on Si with an interfacial SiO2layer
4. Conduction Mechanism of Leakage Current in Ta2 O 5 Films on Si Prepared by LPCVD
5. Effects of oxygen content on the optical properties of tantalum oxide films deposited by ion-beam sputtering
Cited by 44 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Low Voltage a-IGZO Thin Film Transistor Using Tantalum Oxide by Thermal Oxidation;Electronic Materials Letters;2023-04-19
2. Low Voltage a-IGZO Thin Film Transistor Using Tantalum Oxide by Thermal Oxidation;2022-08-17
3. Influence of oxygen partial pressure on the structural, optical and electrical properties of magnetron sputtered Zr0.7Nb0.3O2 films;Applied Physics A;2021-12
4. Electrical and optical properties of (Ta2O5)1−x–(TiO2)x films, x = 0.035, prepared by sputtering of ceramic and mosaic (Ta, Ti) metal targets;Journal of Applied Physics;2021-07-21
5. Capacitance response characteristics of hydrogen sensor with tantalum oxide dielectric layer;International Journal of Hydrogen Energy;2018-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3