Author:
Tsubouchi Kazuo,Masu Kazuya
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Extended Abstracts of the 18th (1986 International) Conference on Solid State Devices and Materials;Amazawa,1986
2. Selective deposition of aluminum from selectively excited metalorganic source by the rf plasma
3. Workshop on Tungsten and Other CVD Metals for ULSI/VLSI Applications VI;Shinzawa,1989
4. 1990 Symposium on VLSI Technology, Digest of Technical Papers;Tsubouchi,1990
5. Complete planarization of via holes with aluminum by selective and nonselective chemical vapor deposition
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