Auger and X-ray photoelectron spectroscopic depth profiling techniques applied to ultra-thin titanium films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Methods of Surface Analysis,1975
2. X-ray Photoelectron Spectroscopic Studies of Interactions in Multicomponent Metal and Metal Oxide Thin Films
3. Quantitative analysis of light elements (nitrogen, carbon, and oxygen) in sputtered tantalum films by Auger electron spectroscopy and secondary ion mass spectrometry (SIMS)
4. Effect of Light Elements (N, C, O) in Tantalum on Tantalum Film Capacitor Properties
5. In-depth profiles of phosphorus ion-implanted silicon by Auger spectroscopy and secondary ion emission
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1. Analysis of Interface Reactions of TiAl/Al2O3 and TiAl/TiO2 by the Use of Chemical Potential Diagram;Journal of the Ceramic Society of Japan;1997
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4. IR and UV laser-assisted deposition from titanium tetrachloride: A comparative study;Advanced Materials for Optics and Electronics;1995-01
5. Characterization of thin titanium oxide adhesion layers on gold: resistivity, morphology, and composition;Surface Science;1994-01
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