The construction and use of thin film thermocouples for the measurement of surface temperature: Applications to substrate temperature determination and thermal bending of a cantilevered plate during film deposition-Reference-Cited by-同舟云学术

The construction and use of thin film thermocouples for the measurement of surface temperature: Applications to substrate temperature determination and thermal bending of a cantilevered plate during film deposition

Published:1980-04 Issue:1 Volume:67 Page:163-170
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Laugier M.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Thermopower in Thin‐Film Copper—Constantan Couples

2. Thin Film Thermocouples for Substrate Temperature Measurement

3. Substrate-Temperature Measurement and Control

4. The preparation and performance of thin film thermocouples

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Kinetics and mechanisms of stress relaxation in sputtered silver thin films;Acta Materialia;2021-12

2. Subsurface Temperature Estimation during Traction Transmission in the Variator of Metal V-Belt CVTs;Tribology Online;2020-01-31

3. The Seebeck Coefficient of Sputter Deposited Metallic Thin Films: The Role of Process Conditions;Coatings;2019-05-01

4. Non-linear dynamical analyses of transient surface temperature fluctuations during subcooled pool boiling on a horizontal disk;International Journal of Heat and Mass Transfer;2009-11

5. Packaging of Surface Micromachined Thin Film Thermocouples (TFT): Comparison of the Resistance Arc Microwelding Technique With Wire Bonding;IEEE Transactions on Components and Packaging Technologies;2009-06