Characterization of Ta2O5 layers by electron spectroscopy for chemical analysis rutherford backscattering spectrometry, nuclear reaction analysis and optical methods-Reference-Cited by-同舟云学术

Characterization of Ta2O5 layers by electron spectroscopy for chemical analysis rutherford backscattering spectrometry, nuclear reaction analysis and optical methods

Published:1989-08 Issue: Volume:175 Page:185-189
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Gu¨rtler K.,Bange K.,Wagner W.,Rauch F.,Hantsche H.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference12 articles.

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