Transmission electron microscopy studies of the polycrystalline silicon-SiO2 interface
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Influence of crystal structure on the luminescence of ions with s2 configuration
2. Structure and Stability of Low Pressure Chemically Vapor‐Deposited Silicon Films
3. Phosphorus Doping of Low Pressure Chemically Vapor‐Deposited Silicon Films
4. Thermal Oxidation of Phosphorus‐Doped Polycrystalline Silicon in Wet Oxygen
5. Grain Growth Mechanism of Heavily Phosphorus‐Implanted Polycrystalline Silicon
Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Poly-Si Thin Film and Substrate Materials;Thin Film Transistors;2004
2. Single-electron effects in highly doped polysilicon nanowires;Physica E: Low-dimensional Systems and Nanostructures;2002-10
3. Effects of N2O Plasma Treatment on the Performance of Excimer-Laser-Annealed Polycrystalline Silicon Thin Film Transistors;Japanese Journal of Applied Physics;2002-09-15
4. Oxidation;Polycrystalline Silicon for Integrated Circuits and Displays;1998
5. Oxidation of Silicon Using Electron Cyclotron Resonance Nitrous Oxide Plasma and Its Application to Polycrystalline Silicon Thin Film Transistors;Journal of The Electrochemical Society;1997-09-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3