Microsensor and microactuator applications of thin films-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Microsensor and microactuator applications of thin films

Published:1989-12 Issue:1-2 Volume:181 Page:235-243
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Howe Roger T

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference34 articles.

1. Heat and strain-sensitive thin-film transducers

2. IEEE Int. Ultrasonic Symp.;Polla,1985

3. IEEE Solid-State Sensors Workshop;Chang,1986

4. Transducers '87, 4th Int. Conf. on Solid-State Sensors and Actuators;Demarne,1987

5. Transducers '87, 4th Int. Conf. on Solid-State Sensors and Actuators;Zellers,1987

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Deep learning–based optimization of a microfluidic membraneless fuel cell for maximum power density via data-driven three-dimensional multiphysics simulation;Bioresource Technology;2022-03

2. A methodology for accelerated testing by mechanical actuation of MEMS devices;Microelectronics Reliability;2012-07

3. Design, fabrication, and characterization of out-of-plane W-form microsprings for vertical comb electrodes capacitive sensor;Journal of Micro/Nanolithography, MEMS, and MOEMS;2009-07-01

4. Micromachined microsensors for manufacturing;IEEE Instrumentation & Measurement Magazine;2004-06

5. Polycrystalline Silicon Films for Electronic Devices;Silicon;2004

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP