Author:
Li Hui-Min,Ni Wei-Xin,Willander Magnus,Berggren Karl-Fredrik,Sernelius Bo E.,Hansson Göran V.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Growth and characterization of a delta‐function doping layer in Si
2. Controlled Atomic Layer Doping and ALD MOSFET Fabrication in Si
3. W.-X. Ni, H.-M. Li, G.V. Hansson, J.-E. Sundgren, M. Willander and V. Koch, to be published.
4. Proc. 17th Int. Conf. on the Physics of Semiconductors;Zrenner,1984
Cited by
11 articles.
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