The influence of the ion flux density on the properties of molybdenum films deposited from the vapour phase under simultaneous argon ion irradiation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Use of ion beam assisted deposition to modify the microstructure and properties of thin films
2. Optical and electrical properties of thin silver films grown under ion bombardment
3. Ion-beam-induced texture formation in vacuum-condensed thin metal films
4. Control of thin film orientation by glancing angle ion bombardment during growth
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