Topographical features of N2+-sputtered metal sandwiches: Their correlation with Auger depth resolution
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy;Hofmann,1983
2. The depth dependence of the depth resolution in composition-depth profiling with Auger Electron Spectroscopy
3. Roughness contributions to resolution in ion sputter depth profiles of polycrystalline metal films
4. Growth of microprojections arising from sputter etching of Cu–Ag sandwich
5. ?Neue Untersuchungen �ber die Kathodenzerst�ubung der Glimmentladung.?
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1. Dry Etching of Copper Phthalocyanine Thin Films: Effects on Morphology and Surface Stoichiometry;Molecules;2012-08-24
2. The interface of laser deposited Cu/Ag multilayers: evidence of the ‘subsurface growth mode’ during pulsed laser deposition;Applied Surface Science;2000-02
3. Sputter depth profile analysis of interfaces;Reports on Progress in Physics;1998-07-01
4. Dependence of resolution on sample material in rotational Auger depth profiling;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-05
5. Energetic beam-induced surface segregation during deposition;Vacuum;1993-10
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