Multiple angle of incidence ellipsometric analysis of non-absorbing two-layer and three-layer systems
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. The investigation of double layers in semiconductor technology
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5. Ellipsometric study of a thin transparent film overlaid on a transparent substrate having a surface layer
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1. Ellipsometry of Thin Film Systems;Progress in Optics;2000
2. Ellipsometric approach for determination of the pseudodielectric function of the Si–interface in the Si–SiO2 structure;Surface Science;1999-12
3. Spectroscopic ellipsometry characterization of strained interface region in thermally oxidized Si(111);Thin Solid Films;1999-04
4. Ellipsometric approach for evaluation of optical parameters in thin multilayer structures;Surface and Interface Analysis;1993-04
5. Multiple-angle ellipsometric study of the interfacial layer in Si?SiO2 structures;Surface and Interface Analysis;1992-06
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