Formation of f.c.c., b.c.c. and β-tantalum films by evaporation-Reference-Cited by-同舟云学术

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Formation of f.c.c., b.c.c. and β-tantalum films by evaporation

Published:1968-12 Issue:5-6 Volume:2 Page:467-477
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Marcus R.B.,Quigley S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference35 articles.

1. A NEW STRUCTURE IN TANTALUM THIN FILMS

2. Effect of Background‐Gas Impurities on the Formation of Sputtered β‐Tantalum Films

3. Tantalum and Tantalum Compounds in Thin Film Microcircuitry

4. Electrical and Structural Properties of Epitaxial bcc Tantalum Films

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