Author:
Schiller S.,Heisig U.,Goedicke K.,Bilz H.,Steinfelder K.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference33 articles.
1. Physical Vapour Deposition,1976
2. Modern production sputtering equipment and materials for electronics manufacturing;Cambey,1977
3. The role of plasmatron/magnetron systems in physical vapour deposition techniques;Schiller;Thin Solid Films,1978
4. Planar magnetron sputtering;Waits,1978
5. Sputter- and S-gun magnetrons;Fraser,1978
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17 articles.
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