Focusing effects in sputter deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. G. Witt, personal communication.
2. A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering System
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Plasma analysis based on newly found similarities in the relative populations of excited states produced by sputtering and by electron impact;Journal of Vacuum Science and Technology;1982-09
2. Electron effects in sputtering and cosputtering;Journal of Applied Physics;1974-05
3. Abstract: Electron effects in sputtering;Journal of Vacuum Science and Technology;1974-01
4. Thin polymer films;Thin Solid Films;1973-11
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