The dependence of coating in inductive R.F. plasmas on gas flow velocity, pressure and R.F. power-Reference-Cited by-同舟云学术

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The dependence of coating in inductive R.F. plasmas on gas flow velocity, pressure and R.F. power

Published:1980-10 Issue:2 Volume:72 Page:249-260
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Khait Y.L.,Inspektor A.,Avni R.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Int. Conf. on Metallurgical Coatings;Inspektor,1980

2. Graphite Materials for Use in Nuclear Reactors, Part 1 - Pyrocarbon;Delle,1979

3. KFA Rep., Jülich, 1499 RW;Carmi,1978

4. IRW Papers presented at the 4th London Int. Carbon and Graphite Conf., 1974;Koizlik,1974

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3. Surface morphology and compound layer pores of plasma nitrocarburized low carbon steel;Metallurgical and Materials Transactions A;1996-01

4. Coating of steel by plasma-activated metal-organic chemical vapour deposition in the Si-C system;Thin Solid Films;1991-03

5. Principles of plasma-activated chemical vapour deposition;Surface and Coatings Technology;1987-12

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