Ion channeling analysis of MBE grown Si1−xGex/Si strained layer superlattices

Author:

Parikh N.R.,Sandhu G.S.,Yu N.,Chu W.K.,Jackman T.E.,Baribeau J.-M.,Houghton D.C.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Surface and Thin-Film Analysis, 3. Ion Detection;Ullmann's Encyclopedia of Industrial Chemistry;2011-10-15

2. Rutherford Backscattering Spectroscopy (RBS);Surface and Thin Film Analysis;2011-04-12

3. Surface and Thin-Film Analysis;Ullmann's Encyclopedia of Industrial Chemistry;2002-01-15

4. Heavy ion RBS analysis of strained layer superlattices;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-05

5. Quantitative Rutherford Backscattering from Thin Films;MRS Bulletin;1993-01

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