The deposition of cermet films from a powder target by R.F. sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Resistivity and Structure of Cr–SiO Cermet Films
2. The development of cermets
3. Resistivity of cermet films containing oxides of silicon
4. Granular Metal Films
5. Secondary Electron Emission from Thin‐Film Gold‐Metaloxide Cermets
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2. Sputter deposition with powder targets: An overview;Vacuum;2021-02
3. Stable Thin Film Resistors for Amorphous Silicon Integrated Circuits;MRS Proceedings;1988-01
4. Simultaneous preparation of Cr-SiO and NiCr thin film resistors on a single substrate;Thin Solid Films;1986-09
5. Electrical properties of 70wt.%Cr-30wt.%SiO thin films;Thin Solid Films;1983-03
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