On the deformation mechanism of 6H-SiC under the nanogrinding of multiple abrasive grains
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference47 articles.
1. Smaller, faster, tougher
2. SiC MEMS: opportunities and challenges for applications in harsh environments
3. Surface functionalization and biomedical applications based on SiC
4. Application of 3C-SiC quantum dots for living cell imaging
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