The use of AFM in assessing the crack resistance of silicon wafers of various orientations

Author:

Lapitskaya Vasilina A.,Kuznetsova Tatyana A.,Khabarava Anastasiya V.,Chizhik Sergei A.,Aizikovich Sergei M.,Sadyrin Evgeniy V.,Mitrin Boris I.,Sun Weifu

Funder

Belarusian Republican Foundation for Fundamental Research

Government Council on Grants, Russian Federation

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference88 articles.

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