High-resolution mastering using AlNiGd metallic glass thin film as thermal absorption layer-Reference-Cited by-同舟云学术

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High-resolution mastering using AlNiGd metallic glass thin film as thermal absorption layer

Published:2010-12 Issue:12 Volume:18 Page:2308-2311
ISSN:0966-9795
Container-title:Intermetallics
language:en
Short-container-title:Intermetallics

Author:

Lee Mei Ling,Yuan Gao Qiang,Gan Chee Lip,Ng Lung Tat,Lim Chow Tian,Ye Kai Dong

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials,General Chemistry

Reference16 articles.

1. Progress in Electron Beam Mastering of 100 Gbit/inch2Density Disc

2. Acid-Breakable Resin-Based Chemical Amplification Positive Resist for Electron-Beam Mastering: Design and Lithographic Performance

3. Electron Beam Recorder with Nanometer-Scale Accuracy for 100 Gbit/in2Density Mastering

4. Manufacture of 27 GB Read-Only-Memory Disc Using Deep-UV Beam Recorder with Two-Dimensional Optical Compensation

5. Liquid Immersion Deep-UV Optical Disc Mastering for Blu-ray Disc Read-Only Memory

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Laser Heat-Mode Lithography on Transparent Thin Films;Laser Heat-Mode Lithography;2019

2. Laser heat-mode lithography characteristics and mechanism of ZnS-SiO2 thin films;Materials Chemistry and Physics;2018-06

3. Metallic resist for phase-change lithography;Scientific Reports;2014-06-16

4. New calix[4]arene derivatives as maskless and development-free laser thermal lithography materials for fabricating micro/nano-patterns;Journal of Materials Chemistry C;2013

5. Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgInSbTe as a Laser Thermal Lithography Film;Chinese Physics Letters;2012-07

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