Author:
Lim Young-Mo,Lim Hyung-Jun,Liu Jang Ryol,Kim Soo Hyun
Subject
Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modeling and Simulation,Ceramics and Composites
Reference11 articles.
1. H.H. Langen, T. Masuzawa, M. Fujino, Self-aligned machining and assembly of high aspect ratio microparts into silicon, in: Proceedings of the IEEE Workshop on MEMS, 1995, pp. 250–255.
2. 3-Dimensional processing by micro electro-discharge machining;Sato;J. JSPE,1995
3. Fabrication of ultrathin drawn Pt wires by extension of the Wollaston process;Sacharoff;Rev. Sci. Instrum.,1985
4. X.-Q. Sun, T. Masuzawa, M. Fujino, Micro ultrasonic machining and self-aligned multilayer machining/assembly technologies for 3D micromachines, in: Proceedings of the IEEE Workshop on MEMS, 1996, pp. 312–317.
5. The development of an electrodischarge machine for micro-hole boring;Sato;Precis. Eng.,1986
Cited by
38 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献