1. Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics;Ehrfeld;Radiat. Phys. Chem.,1995
2. X-ray lithography and its applications;Tolfree;Mater. World,1996
3. Lambda Physik, Excimer laser radiation: the key to advanced technology, Lambda Ind. 8 (1994) 1–6.
4. W. Lutz, E. Wolfgang, et al., Micromolding: a powerful tool for large-scale production of precise microstructures, in: Proceedings of SPIE—The International Society for Optical Engineering, Austin, TX, Vol. 2879, 1996, pp. 156–167.
5. V. Piotter, T. Benzler, T. Hanemann, et al., Manufacturing of micro-parts using micro-molding techniques, in: Proceedings of the First International Euspen Conference, Bremen, 1999, pp. 494–497.