Grinding characteristics of hard and brittle materials by fine grain lapping wheels with ELID

Author:

Itoh Nobuhide,Ohmori Hitoshi

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modelling and Simulation,Ceramics and Composites

Reference5 articles.

1. Proceedings of the 8th IPES;Itoh,1995

2. Mirror Surface Grinding of Silicon Wafers with Electrolytic In-Process Dressing

3. Proceedings of the Bonded Abrasive Machining Forum of JSGE;Itoh,1993

4. Proceedings of the 1st International Abrasive Technology Conference;Itoh,1993

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