Removal of dissolved oxygen in ultrapure water production using microporous membrane modules-Reference-Cited by-同舟云学术

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Removal of dissolved oxygen in ultrapure water production using microporous membrane modules

Published:1994-02 Issue:1-2 Volume:87 Page:99-105
ISSN:0376-7388
Container-title:Journal of Membrane Science
language:en
Short-container-title:Journal of Membrane Science

Author:

Tai M.S.L.,Chua Ivy,Li K.,Ng W.J.,Teo W.K.

Publisher

Elsevier BV

Subject

Filtration and Separation,Physical and Theoretical Chemistry,General Materials Science,Biochemistry

Reference10 articles.

1. Advanced D.I. water system with low dissolved oxygen for ULSI processing;Kasama;Proceedings,1990

2. Advanced ultrapure water systems for ULSI processing;Imaoka,1991

3. Dissolved oxygen removal in ultrapure water for semiconductor processing;Sato,1991

4. Designing hollow-fibre contactors;Yang;AIChE J.,1986

5. Other new membrane processes;Sirkar,1992

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