Dissociative chemisorption of NF3 at Si(100) surfaces
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference17 articles.
1. Plasma etching of sputtered Mo and MoSi2thin films in NF3gas mixtures
2. Anisotropic etching of SiO2in low‐frequency CF4/O2and NF3/Ar plasmas
3. Semiconductor Processing, ASTM STP 850;Barkanic,1984
4. Mass Spectrometric Transient Study of DC Plasma Etching of Si in NF 3 and NF 3 / O 2 Mixtures
5. Plasma and Reagent Pulse Induced Transients in the Etching of Si by NF 3
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Energy-Level Alignment Tuning at Tetracene/c-Si Interfaces;The Journal of Physical Chemistry C;2020-12-11
2. Fluorination of Uranium Metal to UF3 and UF4 by Nitrogen Trifluoride: Evidence for Elusive UF2;MRS Proceedings;2010
3. Dynamics of NF3 in a condensed film on Au(111) as studied by electron-stimulated desorption;Surface Science;2006-10
4. Nitrogen Trifluoride as a Bifunctional Lewis Base: Implications for the Adsorption of NF 3 on Solid Surfaces;European Journal of Inorganic Chemistry;2004-02-24
5. Dissociative adsorption of NF3 on Si(001)-(2×1);Surface Science;2000-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3