Decomposition of NH3 on Si(100): a SSIMS study
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference50 articles.
1. Semiconductor Devices, Physics and Technology;Sze,1985
2. Effect of NH3 on Si(100) vicinal surfaces
3. Electron-energy-loss spectra of the Si(100)-(2×1) surface exposed toNH3
4. Dissociative NH3 adsorption on the Si(100)2 × 1 surface at 300 K
5. Thermal nitridation of Si(100)-2 × 1 surface by NH3: XPS results
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