Low energy electron induced decomposition on surfaces: W(CO)6 on Si(111)-(7 × 7)
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference12 articles.
1. Chemical vapour deposition on silicon: In situ surface studies
2. Studies of adsorption and electron-induced dissociation of Fe(CO)5 on Si(100)
3. Laser‐assisted deposition of iron on Si(111)‐(7×7): The mechanism and energetics of Fe(CO)5 decomposition
4. Mechanisms of laser interaction with metal carbonyls adsorbed on Si(111)7×7: Thermal vs photoelectronic effects
5. Photodecomposition of Mo(CO)6adsorbed on Si(100)
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1. Electron induced reactions of surface adsorbed tungsten hexacarbonyl (W(CO)6);Physical Chemistry Chemical Physics;2013
2. Electron beam deposition for nanofabrication: Insights from surface science;Surface Science;2011-02
3. Low-energy electron-induced reactions in condensed matter;Surface Science Reports;2010-01
4. Selective area chemical vapor deposition of titanium oxide films: Characterization of Ti(OC[sub 3]H[sub 7])[sub 4] as an electron beam resist;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999
5. Photooxidation of M(CO)6 (M=Mo, W) adsorbed on TiO2;Journal of the Chemical Society, Faraday Transactions;1997
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