Dynamics of laser stimulated interaction of chlorine with the GaAs(100) surface-Reference-Cited by-同舟云学术

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Dynamics of laser stimulated interaction of chlorine with the GaAs(100) surface

Published:1988-12 Issue:1 Volume:207 Page:142-158
ISSN:0039-6028
Container-title:Surface Science
language:en
Short-container-title:Surface Science

Author:

Qin Q.Z.,Li Y.L.,Jin Z.K.,Zhang Z.J.,Yang Y.Y.,Jia W.J.,Zheng Q.K.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Reference26 articles.

1. Laser‐induced microscopic etching of GaAs and InP

2. Photochemical dry etching of GaAs

3. Doping level selective photochemical dry etching of GaAs

4. Photon‐assisted dry etching of GaAs

5. Dry, laser‐assisted rapid HBr etching of GaAs

Cited by 32 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Initial surface reactions between Cl[sub 2] molecules and the GaAs (001) 2×4 surface;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001

2. Reactive ion beam etching of GaAs and related compounds in an inductively coupled plasma of Cl[sub 2]–Ar mixture;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999

3. Reactive scattering study of etching dynamics: Cl2 on GaAs(100);Surface Science;1998-11

4. Laser induced gas-surface reaction of Cl2 supersonic molecular beam with a nickel surface;Applied Surface Science;1997-01

5. In-Situ Monitoring Of Etch By-Products During Reactive Ion Beam Etching Of Gaas In Chlorine/Argon;MRS Proceedings;1997

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