A RHEED study of the surface reconstructions of Si(001) during gas source MBE using disilane
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference40 articles.
1. Gas source Si-MBE
2. Gas source silicon molecular beam epitaxy using disilane
3. Growth kinetics in silane gas-source molecular beam epitaxy
4. Kinetics and mechanics of Si2H6 surface decomposition on Si
5. Equilibrium surface hydrogen coverage during silicon epitaxy using SiH4
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