A new application of soft X-ray spectroscopy to a non-destructive analysis of a film/substrate contact system: Carbonized-layer (ultra-thin-film)/Si(100)

Author:

Iwami M.,Kusaka M.,Hirai M.,Nakamura H.,Shibahara K.,Matsunami H.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Reference10 articles.

1. X-ray Spectroscopy;Azaroff,1974

2. Silicon Carbide — A High Temperature Semiconductor,1960

3. Blue-Emitting Diodes of 6H-SiC Prepared by Chemical Vapor Deposition

4. IVA-8 heteroepitaxial growth of cubic silicon carbide on foreign substrates

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