BURIED INTERFACES OF HEAT-LOADED Mo/Si MULTILAYERS STUDIED BY SOFT-X-RAY EMISSION SPECTROSCOPY-Reference-Cited by-同舟云学术

BURIED INTERFACES OF HEAT-LOADED Mo/Si MULTILAYERS STUDIED BY SOFT-X-RAY EMISSION SPECTROSCOPY

Published:2002-04 Issue:02 Volume:09 Page:663-667
ISSN:0218-625X
Container-title:Surface Review and Letters
language:en
Short-container-title:Surf. Rev. Lett.

Author:

MIYATA N.¹,IMAZONO T.¹,ISHIKAWA S.¹,ARAI A.¹,YANAGIHARA M.¹,WATANABE M.¹

Affiliation:

1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

Abstract

We measured Si L2,3 soft-X-ray emission spectra from Mo/Si multilayers annealed at 400°C. We showed that MoSi 2 was formed at the interface, and the thickness of the MoSi 2 interlayer increased with the annealing time. By an analysis of the soft-X-ray emission spectra and the patterns of small-angle X-ray diffraction, we estimated the thickness of the MoSi 2 interlayer and a diffusion coefficient between Mo and Si at 400°C as 1.1 (± 0.2) × 10-18 cm 2/ s . We showed that soft-X-ray emission spectroscopy is a useful tool for studying the thermal change of the buried interface nondestructively.

Publisher

World Scientific Pub Co Pte Lt

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://www.worldscientific.com/doi/pdf/10.1142/S0218625X0200283X

Reference13 articles.

1. Molybdenum-silicon multilayer mirrors for the extreme ultraviolet

2. A Soft-X-Ray Imaging Microscope with a Multilayer-Coated Schwarzschild Objective: Imaging Tests

3. Interface Stability and Silicide Formation in High Temperature Stable MoxSi1−x/Si Multilayer Soft X-Ray Mirrors Studied by Means of X-Ray Diffraction and HRTEM

4. Thermal stability of sputtered Mo/X and W/X (X = BN:O, B_4C:O, Si, and C) multiplayer soft-x-ray mirrors

5. Buried Interfaces in Mo/Si Multilayers Studied by Soft-X-Ray Emission Spectroscopy

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