Mathematical and physical considerations on the spatial resolution in scanning Auger electron microscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference44 articles.
1. Auger Electron Spectroscopy in the Scanning Electron Microscope: Auger Electron Images
2. Auger electron spectroscopy at high spatial resolution and nA primary beam currents
3. High−spatial resolution Auger spectroscopy and Auger integration applications
4. Scanning auger electron microscopy at 30 nm resolution
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