Monte Carlo simulation of thermalization process of sputtered particles
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference13 articles.
1. Study of angular factors in sputter-deposition using the ion beam method
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5. Analyses of sputtered films of Nb3Ge
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2. Three-dimensional Monte Carlo simulations of materials on the physical deposition process;Modern Physics Letters B;2017-08-29
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