Chemistry of silicon oxide annealed in ammonia
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference36 articles.
1. Direct Thermal Nitridation of Silicon Dioxide Films in Anhydrous Ammonia Gas
2. Nitridation of Silicon and Oxidized‐Silicon
3. A multiwafer plasma system for anodic nitridation and oxidation
4. Plasma‐enhanced growth and composition of silicon oxynitride films
5. Rapid thermal nitridation of SiO2 for nitroxide thin dielectrics
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