Excimer laser ablation patterning of dielectric layers
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference20 articles.
1. Metal film removal and patterning using a XeCl laser
2. Femtosecond-excimer-laser patterning of YBa2Cu3O7 films
3. Multishot ablation of polymer and metal films at 248 nm
4. Influence of the substrate on the temperature induced by pulsed laser irradiation of thin films
5. The influence of thermal diffusion on laser ablation of metal films
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