Author:
Kücher P.,Aochi H.,Gambino J.,Licata T.,Matsuda T.,Nguyen S.,Okazaki M.,Palm H.,Ronay M.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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4. 1995 First Int. Dielectrics Conf. for VLSI/ULSI Interconnections;Shapiro,1995
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