Author:
Bakli M.,Göltz G.,Caranhac S.,Bomchil G.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Cited by
7 articles.
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1. Metal silicides in advanced complementary metal-oxide-semiconductor (CMOS) technology;Metallic Films for Electronic, Optical and Magnetic Applications;2014
2. Metal Silicides in CMOS Technology: Past, Present, and Future Trends;Critical Reviews in Solid State and Materials Sciences;2003-11
3. Silicides and ohmic contacts;Materials Chemistry and Physics;1998-02
4. Transition metal silicides in silicon technology;Reports on Progress in Physics;1993-11-01
5. Silicides for integrated circuits: TiSi2 CoSi2;Materials Science and Engineering: R: Reports;1993-11