Optical properties of reactive ICB aluminum oxide films deposited on Si(100)-Reference-Cited by-同舟云学术

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Optical properties of reactive ICB aluminum oxide films deposited on Si(100)

Published:1988-09 Issue: Volume:33-34 Page:966-971
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Urban F.K.,Levenson L.L.,Hashimoto H.,Usui H.,Yamada I.,Takagi T.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference15 articles.

1. Ellipsometry and its applications to surface examination

2. Ellipsometry: Technique for characterization of surfaces and interfaces in light‐transmitting ambients

3. Ueber Oberflächenschichten. II. Theil

4. Optics of Thin Films;Vasicek,1960

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. PE MOCVD of Thin High Transparent Dielectric Amorphous Films of Aluminium Oxide;Le Journal de Physique IV;1995-06

2. Study of the ionized cluster beam technique;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1990-05

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