Laser reactive ablation deposition of silicon carbide films-Reference-Cited by-同舟云学术

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Laser reactive ablation deposition of silicon carbide films

Published:1996-04 Issue: Volume:96-98 Page:866-869
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Leggieri G.,Luches A.,Martino M.,Perrone A.,Alexandrescu R.,Barborica A.,Gyorgy E.,Mihailescu I.N.,Majni G.,Mengucci P.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference11 articles.

1. Deposition of SiO2 by reactive excimer laser ablation from a SiO target

2. Evidence of a nonthermal mechanism for ejection of ions and neutrals during excimer laser ablation of Ge

3. Reactive pulsed laser deposition of thin TiN films

4. Deposition of high quality TiN films by excimer laser ablation in reactive gas

5. SiC membranes for x-ray masks produced by laser ablation deposition

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Laser Assisted Doping of Silicon Carbide Thin Films Grown by Pulsed Laser Deposition;Journal of Electronic Materials;2019-03-06

2. Reduced graphene oxide/iron oxide nanohybrid flexible electrodes grown by laser-based technique for energy storage applications;Ceramics International;2018-11

3. Synthesis of heteroepytaxial 3C-SiC by means of PLD;Applied Physics A;2011-06-15

4. X-ray absorption study of silicon carbide thin film deposited by pulsed laser deposition;Journal of Electron Spectroscopy and Related Phenomena;2011-04

5. SiCxLayers Prepared by Hybrid Laser Deposition and PLD;Plasma Processes and Polymers;2009-03-17

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