Synthesis and properties of ionic conduction polymer for anodic bonding-Reference-Cited by-同舟云学术

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Synthesis and properties of ionic conduction polymer for anodic bonding

Published:2015-03 Issue:3 Volume:26 Page:289-292
ISSN:1001-8417
Container-title:Chinese Chemical Letters
language:en
Short-container-title:Chinese Chemical Letters

Author:

Yin Xu,Liu Cui-Rong

Funder

National Natural Science Foundation of China

Natural Science Foundation for Young Scientists of Shanxi Province, China

Publisher

Elsevier BV

Subject

General Chemistry

Reference8 articles.

1. Packaging-compatible wafer level capping of MEMS devices;Saha;Microelectron. Eng.,2013

2. Research on Some Basic Issues of MEMS Packaging Based on Process Mechanics;Zhu,2007

3. Developing trend of bonding technology for MEMS;Zhang;Electron. Process Technol.,2005

4. Two-anodic bonding;Lapadatu,2010

5. Research on PEI-PEO based solid state polymer electrolyte;Gao;J. Harbin Inst. Technol.,2011

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An overview of polymer-based thermally conductive functional materials;Journal of Materials Science & Technology;2024-09

2. Effect of rare earth oxide CeO2 on the anodic bonding performance of PEG-based MEMS encapsulation materials;Advances in Mechanical Engineering;2021-03

3. Interfacial investigation and mechanical properties of glass-Al-glass anodic bonding process;Journal of Micromechanics and Microengineering;2017-09-12

4. Morphology and stress at silicon-glass interface in anodic bonding;Applied Surface Science;2016-11

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