Author:
Finetti Manuela,Suni Ilkka,Nicolet M.-A.
Reference9 articles.
1. TiN and TaN as diffusion barriers in metallizations to silicon semiconductor devices
2. I. Suni, M. Mäenpää, M.-A. Nicolet and M. Luomajärvi, J. Electrochem. Soc., to be published.
3. Thermal stability of titanium nitride for shallow junction solar cell contacts
4. Proc. 15th IEEE Photovoltaic Specialists' Conf.;Mäenpää,1981
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