Control of Kerf Width in Multi-wire EDM Slicing of Semiconductors with Circular Section

Author:

Okamoto Yasuhiro,Ikeda Takayuki,Kurihara Haruya,Okada Akira,Kido Masataka

Publisher

Elsevier BV

Subject

General Medicine

Reference8 articles.

1. Friedrichs P, Kimoto T, Ley L, Pensl G, Silicon carbide: Volume 1: Growth, defects, and novel applications, Wiley-VCH Verlag GmbH&Co. KGaA, Weinheim; 2010.

2. Power electronics with wide bandgap materials: Toward greener, more efficient technologies;Iacopi;Power Electronics with Wide Bandgap Materials,2015

3. Development of multi-wire EDM slicing method for silicon ingot;Okamoto;Proc. of ASPE 2008 Annual Meeting and the 12th ICPE,2008

4. Miyoshi H, Okamoto Y Uno Y, Okada A, Takahashi H., Takamura S, Ohya J, Yamauchi T, Investigation on EDM slicing of SiC and improvement of process performance (in Japanese), Proc. of the Japan Society for Precision Engineering Spring Meeting; 2010, pp. 555-556.

5. Multi-wire electrical discharge slicing for silicon carbide part 2: Improvement on manufacturing wafers by forty-wire EDS;Itokazu;Materials Science Forum,2014

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