Analysis of Electrical Forces in Multi-wire EDM for Semiconductors

Author:

Kane Makarand M,Kulkarni S V,Bahirat H J,Joshi Suhas S

Publisher

Elsevier BV

Subject

General Medicine

Reference19 articles.

1. Dongre GG, Vesvikar C, Singh RK, Joshi SS. Efficient dicing of silicon ingots for photovoltaic applications. In: Conference Record of the IEEE Photovoltaic Specialists Conference. 2010.

2. Ultra thin silicon wafer slicing using wire-EDM for solar cell application;Joshi;Mater Des.,2017

3. Bamberg E, Rakwal DR. Multi-Wire Electron Discharge Machine. Vol. 1. United States; US 2010/0187203 A1, 2010.

4. Okamoto Y, Uno Y, Okada A, Ohshita S, Hirano T, Takata S. Development of Multi-Wire EDM Slicing Method for Silicon Ingot. In: Proceedings of ASPE 2008 Annual Meeting and the 12th ICPE. Portland, OR, United States; 2008.

5. Challenge to Development of Functional Multi-Wire EDM Slicing Method Using Wire Electrode with Track-Shaped Section;Okamoto;Key Eng Mater,2012

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