Influence of frequency and C2H2 flow on growth properties of diamond-like carbon coatings with AlCrSi co-doping deposited using a reactive high power impulse magnetron sputtering-Reference-Cited by-同舟云学术

Influence of frequency and C2H2 flow on growth properties of diamond-like carbon coatings with AlCrSi co-doping deposited using a reactive high power impulse magnetron sputtering

Published:2018-02 Issue: Volume:647 Page:26-32
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Dai Wei,Kwon Se-Hun,Wang Qimin,Liu Jingmao

Funder

Zhujiang New Star of Science and Technology of Guangzhou City

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

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3. Sridharan, tribologcail properties of pulsed laser deposited DLC/TM (TM=Cr, Ag, Ti and Ni) multilayers;Gayathri;Tribol. Int.,2012

4. Influence of copper content and nanograin size on toughness of copper containing diamond-like carbon films;Ning;Mater. Res. Innov.,2013

5. Optical properties of diamond like carbon films containing copper, grown by high power pulsed magnetron sputtering and direct current magnetron sputtering: Structure and composition effects

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