Preparation of porous alumina abrasives and their chemical mechanical polishing behavior-Reference-Cited by-同舟云学术

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Preparation of porous alumina abrasives and their chemical mechanical polishing behavior

Published:2012-01 Issue:7 Volume:520 Page:2868-2872
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Lei Hong,Wu Xin,Chen Ruling

Funder

National Natural Science Foundation of China

Leading Academic Discipline Project of Shanghai Municipal Education Commission

Tribology Science Fund of State Key Laboratory of Tribology

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Application of Chemical Mechanical Polishing to the Fabrication of VLSI Circuit Interconnections

2. Chemical Mechanical Planarization of Microelectronics Material;Steiferwald,1997

3. CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation

4. Two steps chemical-mechanical polishing of rigid disk substrate to get atom-scale planarization surface

5. Influence of Colloidal Abrasive Size on Material Removal Rate and Surface Finish in SiO2Chemical Mechanical Polishing

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1. Influence of tool-edge radius on the nano-cutting process of non-continuous surfaces in single-crystal silicon;Materials Today Communications;2024-03

2. Low-temperature preparation of spherical nano α-Al2O3 particles by chelating the structure of anhydrous aluminium sols;Ceramics International;2023-12

3. Carbon Fibers and Graphite as Pore-Forming Agents for the Obtention of Porous Alumina: Correlating Physical and Fractal Characteristics;Fractal and Fractional;2022-09-06

4. Development of Zr- and Gd-doped porous ceria (pCeO2) abrasives for achieving high-quality and high-efficiency oxide chemical mechanical polishing;Ceramics International;2022-05

5. Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing;Science China Materials;2021-06-18

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