1. Extended Abstracts, the 52nd Spring Meeting. 2005, the Japan Society Applied Physics and Related Societies;Mochidzuki,2005
2. Proceedings of the Advanced Metallization Conference 2005 (AMC2005), Colorado Springs, CO, U.S.A., September 27–29, 2005 and Tokyo, Japan, October, 13–14, Material Research Society;Tomioka,2005
3. Photoresist Removal using Atomic Hydrogen Generated by Heated Catalyzer
4. Micro-and Nanoelectronics 2003, Zvenigorod, Russia, October 6–10, 2003;Anishchenko,2004
5. Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH4/H2 system