Author:
Alsem D.H.,Stach E.A.,Dugger M.T.,Enachescu M.,Ritchie R.O.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Materials issues in microelectromechanical devices: science, engineering, manufacturability and reliability
2. IEEE International Reliability Physics Symposium Proceedings;Tanner,1998
3. IEEE International Reliability Physics Symposium, San Diego, U.S.A.;Tanner,1999
Cited by
36 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献